Item Condition Price

Varian 313-1005 Cyrostack 8 cryopump 6" ASA and 313-0010 w/c compressor w/gas lines. Rebuilt $5,000

208/240V 1 ph. (Item No. 1030)

Varian 323-0012 W/C compressor 0 psi, 36,647 hrs 208V 1 ph (Item No. 1037) As Is $500

Varian 323-1111 Cryo pump w/ 10" CFF (Item No. 1039) As Is $1,500

Varian 917-0085 cryopump temp monitor. 115V. (Item No. 1026) Excellent $750

Varian 917-0070 Cryo regeneration control with 0-1000 Microns TC meter relay. (Item No. 1024) As Is $350

Varian Cryo with Air Products Displex DE-202OSP expander mounted on 9 1/4" O.D. O-R quick As Is $950

disconnect flg. (Item No. 995)
26 ) DEPOSITION FIXTURES & TOOLING.

P-E 2400, 4400, 4410 target assys., insulators & Moly table for 4" wafers. (Item No. 2425) Good Used

Temescal 17 5/8"d domed planetary for 3 planets - missing. 19 3/8"OD support spider 9 1/2"h. Center Unused $495

drive w/spring belts & pulleys. (Item No. 2420)

Temescal FC-3200 Planets, rings & spiders, etc. (Item No. 2427) Good Used

Varian 3120/3125 4" & 5" wafer planets, domes & rings. (Item No. 2423) Good Used
27 ) DEPOSITION SOURCES-Electron beam.

Brad-Thompson 1617.4, 4 1/2 KW, 1 gun. 15 KV, .3 A, w/pierce gun on CFF. 208/230/3. Gun fil, As Is $3,750

focus, X-Y ADJ & bias PS. (Item No. 3441)

D & W 180o three 1"d pocket linear E-gun. Chain driven crucible over emitter and focus coil. (Item Unused $1,250

No. 3490)

Sloan 180o one-3/4 x 1 x 3/8 Dp. crucible E-gun. (Item No. 3492) Rebuilt $1,200

Sloan 270o four 1 1/2 d x 5/8 Dp. crucible E-gun. 7" x 12 1/4 overall. (Item No. 3494) Rebuilt $4,000

Telemark 272 E beam gun Single crucible, 2 x 2 3/4" dx 1 1/2"d. Lat & long coils 1/2" VCO water Rebuilt $3,500

fittings. (Item No. 3497)

Temescal FIH-180 3" 180o gun w/focus and dither coils. It's an old jewell! (Item No. 3507) Unused $3,250

Temescal 180deg 3 KW permanent magnet gun. Nice for CV-3. (Item No. 3499) Unused $850

Temescal SFIH-270-1 1 1/8"d crucible supersource 10KW E-gun (Item No. 3501) Rebuilt $2,950

Temescal STIH-270-1 7cc 4-pocket supersource E-gun. Side shaft rotation. (Item No. 3505) New $6,950

Temescal SFIH-270-2 2"d Crucible supersource 14KW E-gun (Item No. 3503) Rebuilt $3,500

TLI 100-0010 3 KW Perm. Mag E.B Gun (Item No. 3435) Rebuilt $1,500
28 ) DEPOSITION SOURCES-Sputtering.

Seagate, coustom rotary magnetron sputtering cathodes, 5KW Good Used

Bodine 72rpm motor to drive magnet pack. (Item No. 4495)

Varian DC Sputter gun 2 3/4 CFF Elbow and 18" flexline w/ 1 1/4" d end O-Ring sealed to 2 3/4" CFF Used

(Item No. 3752)
29 ) DIFFUSION PUMPS & PARTS.

1 1/2" CVC VMF-10-04. Ni. plt steel. 7/8"d inlet & 1/2"d foreline. A/C 110V 135W. (Item No. Used $250

867)

1 1/2" CVC VMF-11. Ni. plt steel. 3/8 Q.C. on inlet & foreline. 12 1/s, A/C, 220V, 135W. (Item Used $395

No. 869)

1 7/8" CVC MCF-61. Steel. 3 3/4" OD flg & 3/4"d foreline 40 l/s A/C 110V 350W. (Item No. 871) Used $375

1 7/8" CVC MCF 60-01. Steel. 4" OD flg & 3/4"d foreline. 60 l/s, W/C. 120V 400W. (Item No. Used $450

873)

1" Arthur Smith 1005, W/C 175W 115V (Item No. 865) As Is $150

1" CVC VMF-11 A/C DP with 3/8" SST QC on in & out. 220V. (Item No. 5) As Is $350

1" CVC VMF-10 A/C DP with 1/2" foreline valve and 1" ASA VRC lever main valve. (Item No. 3) As Is $275

10" ASA NRC HS-10, SST 240 V 3900 W. (Item No. 963) Rebuilt $3,500

10" ASA Varian VHS-10 SST. 240 V 4400 W (3 Ph open Delta - 2 elements) (Item No. 969) Rebuilt $6,000

10" ID wide mouth CVC PVMS-100 (Item No. 953) New $1,750
Page 10

First Previous Next Last